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Temperature Measurement during Millisecond Annealing
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Subsecond Annealing of Advanced Materials
The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.
Flash Lamp Annealing
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
Blue Book
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Stranger than Fiction
The autobiography of Denise Robins, the 100-million-copy bestselling Queen of Romance, first published in 1965, and available now for the first time in eBook. Apart from writing over two hundred novels which have sold over one hundred million copies worldwide, Denise Robins led a remarkable life. Love and romance were always dominant influences and were reflected not only in her work but in her attitude to life. All the warmth, compassion and deep understanding of the frailty if the human heart that shine through her novels, can be seen here in her autobiography. It is a story that will captivate her huge audience of readers.
Entwicklung, Bau und Erprobung einer Mikro-PL-Apparatur
Diplomarbeit aus dem Jahr 2008 im Fachbereich Physik - Experimentalphysik, Note: 1,8, Technische Universität Bergakademie Freiberg, Sprache: Deutsch, Abstract: Die Grundlage in der Mikroelektronik spielen Halbleiterbaumaterialien, die sich für ihr jeweiliges Einsatzgebiet aufgrund ihrer diesbezüglichen hervorragenden Eigenschaften auszeichnen. In der vorliegenden Arbeit richtet sich das Augenmerk auf eine optische Charakterisierungsmethode, die Photolumineszenz (PL). Mit ihr können u. a. Einflüsse verschiedener Prozessschritte (z. B. Tempern der Probe) und mikroskopischer Strukturen (z.B. Micropipes im Siliziumkarbid), die für die Leistungsfähigkeit des Bauelementes kritisch sind, unt...
