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Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
Entwicklung von Spritzgießsonderverfahren zur Herstellung von Mikrobauteilen durch galvanische Replikation
Gegenstand ist die Entwicklung eines Verfahrens, bei dem über das Mehrkomponenten-Spritzgießen, kombiniert mit der Galvanoformung (MSG-Prozess), metallische Mikrobauteile mit Oberflächenrauheiten von Rz
Veraenderliche 3D Zellgeruesttraeger auf Cryogelbasis zur Kultivierung von Prostatakarzinomzellen
In this work, three-dimensional (3D) cell scaffolds based on cryogels of different polymers were developed and subsequently used for the cultivation of prostate carcinoma cells. Moreover, different scaffolds on the basis of the silk protein, fibroin, were synthesized and also served as cultivation environment for established prostate cancer cells.
Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren
Refraktive Röntgenlinsen (engl.: Compound Refractive X ray Lenses, CRLs) weisen eine absorptionsbegrenzte numerische Apertur auf. In dieser Arbeit wird ein Feld von CRLs mit jeweils leicht geneigten optischen Achsen verwendet, um diese Limitierung bei der Vollfeldmikroskopie an Laborquellen zu umgehen. Unter anderem wird auf die röntgentiefenlithografische Herstellung von CRLs eingegangen und parallele Felder von CRLs diskutiert (Hartmann-Shack-Wellenfrontsensor, rasternde Abbildungsverfahren). - Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.
Entwicklung miniaturisierter Aktorsysteme basierend auf magnetischen Formgedaechtnislegierungen
In this work, the actuation principles of single-crystal Ni-Mn-Ga alloys based on the magnetic shape memory effect (MSM-effect) and the coupling between their magnetic, mechanical and thermal properties, are investigated. The MSM effect is generated by the magnetically induced reorientation of the crystal structure. Thereby, the magnetic strain up to 10 % can be reached.
Entwicklung eines mikrofluidischen Brailledisplays
For cost reasons braille displays used by the visually impaired to access digital data through the sense of touch are limited to displaying one line of text. However, by using cost effective microfluidic actuators it is possible to manufacture large-scale braille displays. This work describes the working principle and the manufacturing techniques used for fabricating components of such a display and the results of an online survey revealing the user requirements regarding braille displays.
Vergroesserung des Sehfeldes der Roentgen-Phasenkontrast-Bildgebung fuer die klinische Anwendung
X-ray phase contrast imaging is a highly promising technology for the clinical diagnostic. Particularly high demands are placed on the required X-ray gratings, as the core element of this method. Such gratings can be fabricated using LIGA-technology, where the structured area is currently limited to a few centimeters in the diagonal (e.g. 10 cm). In this work possibilities to enlarge the area of X-ray gratings, as they are required for the Talbot-Lau Interferometry, were developed and analyzed.
Entwicklung neuer Materialien fuer die additive Fertigung und das Rapid Prototyping von Glas und Polymethylmethacrylat
Curable nanocomposites were developed to fabricate fused silica glass. During a thermal debinding and sintering step a transparent fused silica glass is received. These nanocomposites can be structured using stereolithography or replicative processes. PMMA prepolymers were developed which can be structured using lithography in a few seconds. PFPEs were established as a stereolithography material.
Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Aufgrund eines Trends zur Miniaturisierung vieler MEMS-Bauelemente und somit auch der Kavernenvolumina von Inertialsensoren wird der Einfluss geringfügiger Veränderungen der Dämpfungsatmosphäre in Sensorkavernen auf die Zuverlässigkeit der Sensoren immer größer. In dieser Arbeit werden Mechanismen untersucht, die sich auf die Druckstabilität von Gyroskopen auswirken, und Gegenmaßnahmen vorgestellt. Ein Schwerpunkt liegt auf Desorptionsquellen sowie Gasdiffusionspfaden im Sensoraufbau. - Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
Entwicklung einer Roentgenzoomlinse
Imaging methods such as X-ray microscopy are used in non-destructive material analysis to achieve resolutions in the sub micrometer range. Imaging optics are required, for which X-ray lenses are particularly suitable for photon energies above 10 keV. To ensure the universal use of these lenses with constant optical properties over a wide photon energy range, for the first time an X-ray zoom lens was developed in this work.
