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Microelectronic Materials and Processes
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia and industry who have come to...
Coatings on Glass
This is the second, revised edition of a book that has already proved invaluable to a wide range of readers. Written by a scientist for scientists and technical people, it goes beyond the subject matter indicated by the title, filling the gap which previously existed in the available technical literature. It includes a wealth of information for physicists, chemists and engineers who need to know more about thin films for research purposes, or who want to use this special form of solid material to achieve a variety of application-oriented goals.
Thin Film Processes II
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. - Provides an all-new sequel to the 1978 classic, Thin Film Processes - Introduces new topics, and several key topics presented in the original volume are updated - Emphasizes practical applications of major thin film deposition and etching processes - Helps readers find the appropriate technology for a particular application
Inorganic Syntheses
The volumes in this continuing series provide a compilation of current techniques and ideas in inorganic synthetic chemistry. Includes inorganic polymer syntheses and preparation of important inorganic solids, syntheses used in the development of pharmacologically active inorganic compounds, small-molecule coordination complexes, and related compounds. Also contains valuable information on transition organometallic compounds including species with metal-metal cluster molecules. All syntheses presented here have been tested.
Scanning Probe Microscopy and Spectroscopy
A practical introduction to basic theory and contemporary applications across a wide range of research disciplines Over the past two decades, scanning probe microscopies and spectroscopies have gained acceptance as indispensable characterization tools for an array of disciplines. This book provides novices and experienced researchers with a highly accessible treatment of basic theory, alongside detailed examples of current applications of both scanning tunneling and force microscopies and spectroscopies. Like its popular predecessor, Scanning Probe Microscopy and Spectroscopy, Second Edition features contributions from distinguished scientists working in a wide range of specialties at univer...
Chemical Vapour Deposition
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Emergent Process Methods for High-Technology Ceramics
This volume constitutes the Proceedings of the November 8-10, 1982 Conference on EMERGENT PROCESS METHODS FOR HIGH TECHNOLOGY CERAMICS, held at North Carolina State University in Raleigh. It was the nineteenth in a series of "University Conferences on Ceramic Sci ence" initiated in 1964 by four institutions of which North Carolina State University is a charter member, along with the University of California at Berkeley, Notre Dame University, and the New York State College of Ceramics at Alfred University. More recently, ceramic oriented faculty in departments at the Pennsylvania State University and Case-Western Reserve University have joined the four initial institutions as permanent membe...
