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This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different application fields from a chronological perspective: we start with the early concepts of step coverage and later conformality in semiconductor manufacturing, and how later on the range of application branched out to include others such as energy storage, catalysis, and more broadly nanomaterials synthesis. The book will describe the ballistic and continuum descriptions of gas transport on nanostructur...
With techniques bridging the gap between surface science and heterogeneous catalysis the book presents a tool-kit for anyone wishing to prepare and define solid catalysts.
This issue gives an overview of the cutting edge research in the various areas where Atomic Layer Deposition (ALD) can be used, enabling the identification of issues, challenges, and areas where further research is needed. Contributions include: Memory applications, Interconnects and contacts, ALD Productivity enhancement and precursor development, ALD for optical and photonic applications, and Applications in other areas, such as MEMs, nanotechnology, fabrication of sensors and catalysts, etc.
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Ultrathin metal oxide layers have emerged in recent years as a powerful approach for substantially enhancing the performance of photo, electro, or thermal catalytic systems for energy, in some cases even enabling the use of highly attractive materials previously found unsuitable. This development is due to the confluence of new synthetic preparation methods for ultrathin oxide layers and a more advanced understanding of interfacial phenomena on the nano and atomic scale. This book brings together the fundamentals and applications of ultrathin oxide layers while highlighting connections and future opportunities with the intent of accelerating the use of these materials and techniques for new ...