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MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
Materials and manufacturing techniques are a few of the vital processes in production industries. Most of the materials processing and manufacturing techniques currently used in industries are a major cause of environmental pollution and are hence unsustainable. This book provides in-depth knowledge about challenges faced during the processing of advanced materials and discusses possible ways to achieve sustainability in manufacturing. This book: Covers advances in cryogenic machining, optimization, and economical and energy assessment of machining Provides case studies and numerical design with analysis using computational fluid dynamics of minimum quantity lubrication mist droplets Reviews...
The purpose of this book is to provide an up-to-date view of latest research advances in the design of efficient small-scale energy harvesters through contributions of internationally recognized researchers. The book covers the physics of the energy conversion, the elaboration of electroactive materials and their application to the conception of a complete microgenerator, and is organized according to the input energy source. I sincerely hope you will find this book as enjoyable to read as it was to edit, and that it will help your research and/or give new ideas in the wide field of energy harvesting.
The title of this book, Plasmonics: Principles and Applications, encompasses theory, technical issues, and practical applications which are of interest for diverse classes of the plasmonics. The book is a collection of the contemporary researches and developments in the area of plasmonics technology. It consists of 21 chapters that focus on interesting topics of modeling and computational methods, plasmonic structures for light transmission, focusing, and guiding, emerging concepts, and applications.
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution o...
The book presents recent advances in the following fields: Theoretical aspects, characterization and applications of powder and PM products. New developments in powder production and processing. Functional Materials. Nanomaterials and Nanotechnologies. Health, Safety and Environmental Aspects of Particulates. Keywords: Powder Metallurgy, Powder Characterization, Functional Materials, Nanomaterials, Health Aspects of Particulates, Environmental Aspects of Particulates, Microwires in Cellulose Matrix, Multi-layer Steel, Reactive Mechanical Milling, Green Synthesis of Nanoparticles, Linear Homopolymers, Plasma Jet Depositions on Steel, Mössbauer Spectroscopy of Nanocomposites, Manganese Silicides, Quartz Sand, Weldability Model, Thin Films for Optical MEMS, Magnetron Sputtered Thin Films, Graphene Oxide / PVC Composites, Amorphous Alloy Preparation, Zirconium-doped Indium Oxide, W/Cu Nanocomposite Powders, W/Cu Functionally Graded Materials, Reactive Magnetron Sputtering, Heusler Alloys.
Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy. This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale. Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques Compares a variety of electro-fabrication techniques, outlining which is best in different situations Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM