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This work is based on experiences acquired by the authors regarding often asked questions and problems during manifold education of beginners in analytical transmission electron microscopy. These experiences are summarised illustratively in this textbook. Explanations based on simple models and hints for the practical work are the focal points. This practically- oriented textbook represents a clear and comprehensible introduction for all persons who want to use a transmission electron microscope in practice but who are not specially qualified electron microscopists up to now.
These proceedings present current research on issues related to stress-induced phenomena in on-chip metal interconnects and solder joints. The volume will appeal to scientists, engineers, graduate students interested in research and development of microelectronic devices as well as technology integration, and semiconductor industry professionals and equipment suppliers.
Consists of four sections with distinctive titles: Buchhandels-Adressbuch für die Bundesrepublik Deutschland (varies slightly), Adressbuch des Oesterreichischen Buch-, Kunst-, Musikalien- und Zeitschriftenhandels, Schweizer Buchhandel-Adressbuch, Verzeichnis des ausländiscen Buchhandels, 1954, and Verzeichnis des Buchhandels anderer Länder, 1955-1974/75.
Tiny metal structures, less than a millionth of a meter across, are critical building blocks in a number of high-tech devices such as computer chips. These "metallizations" are subjected to extreme conditions of temperature, electric current density, and mechanical load, which may cause the device they are in to fail. This book contains research papers on these metallizations and on the reliability problems associated with them. The papers were peer reviewed for these proceedings.
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Continuing the spirit of the previous workshops, the proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. The current technology drive to implement low dielectric constant materials into copper metallization has brought new and significant challenges in process integration and reliability. Stresses arising in metallizations and surrounding dielectric structures due to thermal mismatch, electromigration, microstructure changes or process integration can lead to damage and failure of interconnect structures. Understanding stress-related phenomena in new materials and structures becomes critical for reliability improvement and metallization development. This is reflected in the papers included in the proceedings, which report results on electromigration, thermal stresses and void formation in copper-low k interconnect structures. The book also includes new results on fracture of low k dielectric structures, an important research area for reliability and integration of copper metallization.
Die Autoren des Buches fassen ihre im Zuge vielseitiger Lehrtätigkeit gesammelten Erfahrungen zu häufig gestellten Fragen und Problemen von Anfängern im Umgang mit dem analytischen Transmissionselektronenmikroskop anschaulich zusammen. Dabei bilden Erklärungen anhand einfacher Modellvorstellungen und Hinweise zur praktischen Umsetzung des Erlernten die Schwerpunkte des Buches. Dieses praxisnahe Lehrbuch bietet somit eine klare und verständliche Einführung für all jene, die für Ihre Arbeit das Transmissionselektronenmikroskop verwenden wollen, jedoch noch nicht speziell dafür ausgebildet sind.