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Handbook of Silicon Based MEMS Materials and Technologies
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of ...
Introduction to Microfabrication
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of...
Microbiorobotics
Introduction -- Fundamentals of Cellular Mechanics -- Theoretical Microbiorobotics -- Experimental Microbiorobotics -- Perspectives and Outlook.
Micromixers
The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis.The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds.Micromixers is uniquely comprehensive, in that it deals not only with the problems that...
Nanotechnology
This book provides an overview of the rapidly growing and developing field of nanotechnology, focusing on key essentials and structured around a robust anatomy of the subject. The newcomer to nanotechnology, who may well have a strong background in one of the traditional disciplines such as physics, mechanical or electrical engineering, chemistry or biology or who may have been working in microelectromechanical systems (MEMS) technology, is confronted with a bewildering range of information. This book brings together the principles, theory and practice of nanotechnology, giving a broad yet authoritative introduction to the possibilities and limitations of this exciting field. - Succinct chapter summaries allow readers to grasp quickly the concepts discussed and gain an overview of the field - Discusses design and manufacture and applications and their impact in a wide range of nanotechnology areas - An ideal introduction for businesses and potential investors in nanotechnology
Applied Nanotechnology
Applied Nanotechnology: The Conversion of Research Results to Products examines the commercial and social aspects of nanotechnology. The book is organized into four parts. Part 1 presents an overview of nanotechnology. It discusses the definition of nanotechnology; the relationship between wealth, technology, and science; the relationship between nanotechnology and innovation; and the question of why one might wish to introduce nanotechnology. Part 2 explains the nanotechnology business and the applications of nanotechnology in a wide range of industries, including engineering, aerospace, automotive, food, textiles, information technologies, and health. Part 3 deals with specific commercial and financial aspects. These include business models for nanotechnology enterprises, demand assessment for nanotechnology products, and the design of nanotechnology products. Part 4 looks at the future of nanotechnology. It examines how nanotechnology can contribute to the big challenges faced by humanity, such as climate change and terrorism. Ethical issues are also considered, including risk, uncertainty, and regulation.
Micromanufacturing Engineering and Technology
Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, s...
Ceramic Thick Films for MEMS and Microdevices
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications – forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It i...
Nano Optoelectronic Sensors and Devices
Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are lightweight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices from carbon nanotube (CNT) nanowires and provide a series of practical guidelines for their design and manufacture, using processes such as nano-robotic manipulation and assembly methods. They also introduce the design and operational principles of opto-electrical sensing devices at the nano scale. Thermal annealing and packaging...
Microfabrication for Industrial Applications
Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film res...
