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EUV Lithography
Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar mate...
Thermo-Mechanical Modeling of Additive Manufacturing
Thermo-mechanical Modeling of Additive Manufacturing provides the background, methodology and description of modeling techniques to enable the reader to perform their own accurate and reliable simulations of any additive process. Part I provides an in depth introduction to the fundamentals of additive manufacturing modeling, a description of adaptive mesh strategies, a thorough description of thermal losses and a discussion of residual stress and distortion. Part II applies the engineering fundamentals to direct energy deposition processes including laser cladding, LENS builds, large electron beam parts and an exploration of residual stress and deformation mitigation strategies. Part III con...
Case Studies in Superconducting Magnets
The 2nd edition emphasizes two areas not emphasized in the 1st edition: 1) high-temperature superconductor (HTS) magnets; 2) NMR (nuclear magnetic resonance) and MRI (magnetic resonance imaging) magnets. Despite nearly 40 years of R and D on superconducting magnet technology, most areas, notably fusion and electric power applications, are still in the R and D stage. One exception is in the area of NMR and MRI. NMR magnets are very popular among chemists, biologists, genome scientists, and most of all, by drug manufacturers for drug discovery and development. MRI and NMR magnets have become the most successful application of superconducting magnet technology and this trend should continue. The 2nd edition will have new materials never treated formally in any other book of this kind. As with the 1st, most subjects will be presented through problem format to educate and train the designer.
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