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These proceedings describe processing, materials, and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Vols. for 1963- include as pt. 2 of the Jan. issue: Medical subject headings.
This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
First published in 1996. Always there are hills in the distance, backed by mountains, wreathed in mist, and always the sound of water. These are the things that have inspired the Korea’s poets and artists and haunt the dreams of its exiles. An eastern backbone of sharp mountains has ribs that run westward and from these wooded hills flow the water that trickles through the rice fields. Climatic maps show it to be at the centre of a small area that is almost unique in its combination of cold dry winters and hot rainy summers. Most of its plants and animals are common to the temperate zone of the Northern Hemisphere but they are tested almost to destruction by seasonal alternations of Siberian cold and summer monsoons. In May the brown desert of winter begins to shimmer in a delicate veil of green which grows into a summer jungle and dies with glory in a long warm autumn of red and gold. About 600 miles in length and 150-200 miles wide, it reaches out from the mainland like an oriental Italy, with China embracing it to the north and west and Japan only 100 miles away to the south and east. This book illuminates the reader about the history of Korea.