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Handbook of Silicon Based MEMS Materials and Technologies
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of ...
Introduction to Microfabrication
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of...
Kootut seilitykset
Teoksessa kootaan yhdeksi kokonaisuudeksi fysikaalinen maailmankuva ja ihmisen evolutiivinen kehitysmalli. Talouden, kulttuurin ja yhteiskunnan kehitystä selitetään fysiikasta lähtien ja evoluutiolla täydentäen. Osansa saavat myös muun muassa fysikaalisen maailmankuvan filosofinen ulottuvuus ja vertailu muihin selitysmalleihin. Uskonnon, ideologioiden ja aatteiden syntyä ja merkitystä selostetaan laajasti osana ihmisen maailmankuvaa. Lopulta nämä perusteet nivotaan yhteen kirjoittajan omaan henkilöhistoriaan sen selittämiseksi tai ymmärtämiseksi, miksi maailmankuva on sellainen kun on. Kirjassa liikutaan reippaasti eri tieteen aloilla, historian aikakausilla ja kulttuureissa. Tuloksena on varsin poikkeuksellinen ja kokonaisvaltainen kooste yhden maailmankuvan perusteista.
Smart Sensors and MEMS
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and te...
Silicon Epitaxy
Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded.
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