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Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar mate...
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
An epic account of the decades-long battle to control what has emerged as the world’s most critical resource—microchip technology—with the United States and China increasingly in conflict. You may be surprised to learn that microchips are the new oil—the scarce resource on which the modern world depends. Today, military, economic, and geopolitical power are built on a foundation of computer chips. Virtually everything—from missiles to microwaves—runs on chips, including cars, smartphones, the stock market, even the electric grid. Until recently, America designed and built the fastest chips and maintained its lead as the #1 superpower, but America’s edge is in danger of slipping...
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Regulating Offshore Petroleum Resources examines the main regulatory characteristics of the Norwegian and the British models for petroleum exploration, production and supply. The authors explore to what extent these models are relevant for the design of regulatory models in countries with significant existing petroleum resources. The applicability of these regulatory models to countries with potential petroleum resources is also assessed.
BollySwar is a decade-wise compendium of information about the music of Hindi films. Volume 8 chronicles the Hindi film music of the decade between 2001 and 2010. This volume catalogues more than 1000 films and 8000 songs, involving more than 2000 music directors, lyricists and singers. An overview of the decade highlights the key artists of the decade - music directors, lyricists and singers - and discusses the emerging trends in Hindi film music. A yearly review provides listings of the year's top artists and songs and describes the key milestones of the year in Hindi film music. The bulk of the book provides the song listing of every Hindi film album released in the decade. Basic informat...
ProjectX India | 15th March 2022 edition provides you with power-packed information on 203 projects, contracts and tenders from 60 sectors and sub-sectors of the Indian economy. In this issue we have covered 55 projects in the Conceptual/Planning Stage, 34 Contract Awards, 15 Projects Under Implementation, 87 Tenders, and 12 other projects. The project information is provided along with nearest contacts as available in the public domain to facilitate B2B exchange. This e-book serves to all those who are interested to know and tap the project opportunities in the Construction, Infrastructure, and Industrial segment. Our aim is to serve you with the right information on upcoming and ongoing projects, contracts, and tenders from India. The business opportunities are coming to the fore each day, and we, at ProjectX, are eager to grab and provide the information which can make a difference to your business. Identify the right project through ProjectX India and accelerate your business.