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LIGA and its Applications
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.
Micro and Nano Fabrication
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Development of an Electrochemical Biosensor Platform and a Suitable Low-Impedance Surface Modification Strategy
In this work, a flexible biosensor platform based on impedance spectroscopy and comprising of gold electrodes, polymeric flow cells and a suitable surface modification were developed. Initially, several surface modification techniques described in literature were implemented and optimized for impedimetric biosensors but their individual limitations rendered them unsuitable for this biosensor platform. A novel method based on photobleaching was developed and tested showing satisfactory results.
Micro- and Nanostructured Microfluidic Devices for Localized Protein Immobilization and Other Biomedical Applications
A new immobilization method for the localized adsorption of proteins on thermoplastic surfaces is introduced. Artificial three-phase interfaces were realized by surface structuring to control the wetting behavior which lead to a preferred adsorption in these modified areas. Additionally, different fabrication methods were analyzed to determine mass fabrication capabilities. These fabrication methods also allowed the production of fully structured microchannels to tune the fluids behavior within.
MEMS Cost Analysis
This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries. The content examines the processes and equ
Hot Embossing
The second edition of Hot Embossing: Theory of Microreplication will present the current state of the art in microreplication with a focus on hot embossing, nanoimprint, thermoforming, and roll-to-roll replication. Polymer processing, the theory of polymers and the processing of polymers are discussed in detail. Aspects of process simulation and the corresponding material models are also covered. The book contains in-depth analysis of processing processes and replication techniques including mold fabrication. Monitoring, data analysis and reliability of molded parts is also discussed. In the Second Edition new processes are included, including the process of micro- and nanothermoforming to g...
Der Weg zum KIT : von der jahrzehntelangen Zusammenarbeit des Forschungszentrums Karlsruhe mit der Universität Karlsruhe (TH) zur Gründung des Karlsruher Instituts für Technologie. Eine Darstellung nach den Aussagen von Zeitzeugen
The formation of the Karlsruhe Institute of Technology (KIT) is described as a longlasting process which made the partners in the merger of 2009 come closer since the beginning of the Nuclear Research Center at Karlsruhe in 1956. By the means of common chairs and institutes the Nuclear Research Center and the University of Karlsruhe made experiences seminal for the idea of KIT born and put into effect wihin the competition of excellency initated by the federal government and the federal states.
Magnetoresistive and Thermoresistive Scanning Probe Microscopy with Applications in Micro- and Nanotechnology
This work presents approaches to extend limits of scanning probe microscopy techniques towards more versatile instruments using integrated sensor concepts. For structural surface analysis, magnetoresistive sensing is introduced and thermoresistive sensing is applied to study nanoscale phonon transport in chain-like molecules. Investigating with these techniques the properties of shape memory polymers, a fabrication method to design application-inspired micro- and nanostructures is introduced.
Micromanufacturing Engineering and Technology
Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, s...
Fabrication and Analysis of Bio-Inspired Smart Surfaces
This work introduces novel techniques for the fabrication of bio-inspired hierarchical micro- and nanostructures. The enormous potential of these techniques is demonstrated by presenting a synthetic gecko-like adhesive matching the adhesion and self-cleaning of geckos very closely and a nanofur which is superhydrophobic, superoleophilic, underwater air-retaining, and even self-healing when surface treated.
