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ULSI Process Integration 6
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
Science Abstracts
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Williams' Cincinnati Directory ...
Issues for 1860, 1866-67, 1869, 1872 include directories of Covington and Newport, Kentucky.
Physics and Chemistry at Low Temperatures
Tunneling reactions in chemistry are characterized by the low-temperature limit when the classical contribution is negligible. Many practical applications benefit from the lack of heat and have a deep physical basis. Interesting advantages of chemical synthesis at low temperatures have also been demonstrated. This book covers fundamental and practical aspects of the processes and experimental and theoretical methods used in the field. The chapters are written by leading scientists who have very strong experience in the selected topics, and many practical recommendations can be found in this book.
Theoretical Chemistry and Physics of Heavy and Superheavy Elements
Quantum mechanics provides the fundamental theoretical apparatus for describing the structure and properties of atoms and molecules in terms of the behaviour of their fundamental components, electrons and nudeL For heavy atoms and molecules containing them, the electrons can move at speeds which represent a substantial fraction of the speed of light, and thus relativity must be taken into account. Relativistic quantum mechanics therefore provides the basic formalism for calculating the properties of heavy-atom systems. The purpose of this book is to provide a detailed description of the application of relativistic quantum mechanics to the many-body prob lem in the theoretical chemistry and p...
