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Plasma Electronics
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental
Advances in Atomic, Molecular, and Optical Physics
This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such as atmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.
Plasma Electronics
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Nonequilibrium Effects in Ion and Electron Transport
This volume presents the contributions of the participants in the Sixth International Swarm Seminar, held August 2-5, 1989, at the Webb Institute in Glen Cove, New York. The Swarm Seminars are traditionally held as relatively small satellite conferences of the International Conference on the Physics of Electronic and Atomic Collisions (ICPEAC) which occurs every two years. The 1989 ICPEAC took place in New York City prior to the Swarm Seminar. The focus of the Swarm Seminars has been on basic research relevant to understanding the transport of charged particles, mainly electrons and ions, in weakly ionized gases. This is a field that tends to bridge the gap between studies of fundamental bin...
Programme and The Book of Abstracts / Twelfth Annual Conference YUCOMAT 2010
The First Conference on materials science and engineering, including physics, physical chemistry, condensed matter chemistry, and technology in general, was held in September 1995, in Herceg Novi. An initiative to establish Yugoslav Materials Research Society was born at the conference and, similar to other MR societies in the world, the programme was made and objectives determined. The Yugoslav Materials Research Society (Yu-MRS), a nongovernment and non-profit scientific association, was founded in 1997 to promote multidisciplinary goal-oriented research in materials science and engineering. The main task and objective of the Society has been to encourage creativity in materials research a...
