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MEMS: A Practical Guide of Design, Analysis, and Applications
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Integrated Biochips for DNA Analysis
The objective of this book is to provide up-to-date coverage of some of the emerging developments in the field of integrated DNA biochips. It will prove a useful source of information for researchers in the field and for those who are just entering the field of biochip research.
Dynamics of Microelectromechanical Systems
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.
BioMEMS and Biomedical Nanotechnology
Contributions reporting on fundamental and applied investigations of the material science, biochemistry, and physics of biomedical microdevices with applications to Genomics and Proteomics. Topics include gene expression profiling utilizing microarray technology; imaging and sensing for gene detection and use in DNA analysis; and coverage of advanced microfluidic devices and the Humane Genome Project.
Silicon Carbide Microsystems for Harsh Environments
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Radioisotope Thin-Film Powered Microsystems
“Radioisotope Thin-Film Powered Microsystems” describes high energy density microbatteries required for compact long lifetime wireless sensor Microsystems. These microbatteries are presented alongside theories employing high energy density radioisotope thin films in actuating novel electromechanical energy converters. Also discussed are novel wireless sensor architectures that enable long lifetime wireless sensors Microsystems with minimal amounts of radioisotope fuel used. Ultra low-power beta radiation counting clocks are described in order to illustrate the application of radioisotope thin films in realizing the deployment of various components of Microsystems. “Radioisotope Thin-Film Powered Microsystems” also presents the latest work on 3D silicon electrovoltaic converters and energy density microbatteries required for high-power Microsystems.
MEMS Materials and Processes Handbook
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
