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The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Conte...
A first step in developing a clean and sustainable future is to think differently about everyday products, in particular how they influence energy use. Green Nanotechnology: Solutions for Sustainability and Energy in the Built Environment explores the science and technology of tiny structures that have a huge potential to improve quality of life wh
Of meeting -- Materials and measurements -- Surfaces and mirrors -- Thin films -- Fundamental mechanisms -- Presented by title only (papers not presented at conference).
In early 1987 I was attempting to develop a CVD-based tungsten process for Intel. At every step ofthe development, information that we were collecting had to be analyzed in light of theories and hypotheses from books and papers in many unrelated subjects. Thesesources were so widely different that I came to realize there was no unifying treatment of CVD and its subprocesses. More interestingly, my colleagues in the industry were from many disciplines (a surface chemist, a mechanical engineer, a geologist, and an electrical engineer werein my group). To help us understand the field of CVD and its players, some of us organized the CVD user's group of Northern California in 1988. The idea for w...
This book, the third in a series of four publications issued annually as a deliverable of the research school established within the European Network of Excellence CMA (for Complex Metallic Alloys), is written by reputed experts in the fields of surface physics and chemistry, metallurgy and process engineering. It combines expertise found inside as well as outside the network. The CMA network focuses on the huge group of largely unknown multinary alloys and compounds formed with crystal structures based on giant unit cells containing clusters, with many tens or up to thousands of atoms per unit cell. In these phases, for many phenomena, the physical length scales are substantially smaller th...
This volume constitutes the Proceedings of the November 8-10, 1982 Conference on EMERGENT PROCESS METHODS FOR HIGH TECHNOLOGY CERAMICS, held at North Carolina State University in Raleigh. It was the nineteenth in a series of "University Conferences on Ceramic Sci ence" initiated in 1964 by four institutions of which North Carolina State University is a charter member, along with the University of California at Berkeley, Notre Dame University, and the New York State College of Ceramics at Alfred University. More recently, ceramic oriented faculty in departments at the Pennsylvania State University and Case-Western Reserve University have joined the four initial institutions as permanent membe...