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Modeling of Chemical Vapor Deposition of Tungsten Films
Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Wer...
Advanced Computational Methods in Science and Engineering
The aim of the present book is to show, in a broad and yet deep way, the state of the art in computational science and engineering. Examples of topics addressed are: fast and accurate numerical algorithms, model-order reduction, grid computing, immersed-boundary methods, and specific computational methods for simulating a wide variety of challenging problems, problems such as: fluid-structure interaction, turbulent flames, bone-fracture healing, micro-electro-mechanical systems, failure of composite materials, storm surges, particulate flows, and so on. The main benefit offered to readers of the book is a well-balanced, up-to-date overview over the field of computational science and engineering, through in-depth articles by specialists from the separate disciplines.
Computational Science – ICCS 2009
The two-volume set LNCS 5544-5545 constitutes the refereed proceedings of the 9th International Conference on Computational Science, ICCS 2009, held in Baton Rouge, LA, USA in May 2008. The 60 revised papers of the main conference track presented together with the abstracts of 5 keynote talks and the 138 revised papers from 13 workshops were carefully reviewed and selected for inclusion in the three volumes. The general main track of ICSS 2009 was organized in about 20 parallel sessions addressing the following topics: e-Science Applications and Systems, Scheduling, Software Services and Tools, New Hardware and Its Applications, Computer Networks, Simulation of Complex Systems, Image Processing, Optimization Techniques, and Numerical Methods.
Computational Science - ICCS 2007
Part of a four-volume set, this book constitutes the refereed proceedings of the 7th International Conference on Computational Science, ICCS 2007, held in Beijing, China in May 2007. The papers cover a large volume of topics in computational science and related areas, from multiscale physics to wireless networks, and from graph theory to tools for program development.
Computational Science – ICCS 2008
The three-volume set LNCS 5101-5103 constitutes the refereed proceedings of the 8th International Conference on Computational Science, ICCS 2008, held in Krakow, Poland in June 2008. The 167 revised papers of the main conference track presented together with the abstracts of 7 keynote talks and the 100 revised papers from 14 workshops were carefully reviewed and selected for inclusion in the three volumes. The main conference track was divided into approximately 20 parallel sessions addressing topics such as e-science applications and systems, scheduling and load balancing, software services and tools, new hardware and its applications, computer networks, simulation of complex systems, image...
Computational Science -- ICCS 2005
The Fifth International Conference on Computational Science (ICCS 2005) held in Atlanta, Georgia, USA, May 22-25, 2005 ...
Transport Simulation in Microelectronics
Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, however, generally looked on as a last resort due to the extremely slow convergence of these methods. It is of interest, then, to examine when in microelectronics it is nec...
