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Optical Micro- and Nanometrology in Manufacturing Technology
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
MEMS and MOEMS Technology and Applications
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
MEMS Mirrors
This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Integrated Optics: Theory and Applications
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Handbook of Optical Dimensional Metrology
Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods
Bonding in Microsystem Technology
This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
Trends in Optics
Anna Consortini, The President of the International Commission for Optics (ICO), has accommodated a broad spectrum of optical science topics in Trends in Optics. This book, a compilation of research reviews written by outstanding figures in the field of optics, is aimed not only at specialists in the optical sciences, but also at scientists in other fields who might want to broaden their knowledge of optics. The latest developments in this rapidly progressing field are described, and new applications are detailed--including some previously undisclosed material on the U.S. 'Star Wars project. Authoritative and approachable, this volume should provide comprehensive insight into the ever-expanding optical sciences. Key Features * Edited by the president of the International Commission for Optics * Includes research reviews written by experts in the field * Compiles a wide range of topics in optical science
Optical Inspection of Microsystems
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert cont...
Frontiers of Assembly and Manufacturing
The technologies for product assembly and manufacturing evolve along with the advancement of enabling technologies such as material science, robotics, machine intelligence as well as information and communication. Furthermore, they may be subject to fundamental changes due to the shift in key product features and/or - gineering requirements. The enabling technologies emerging offer new opportunities for moving up the level of automation, optimization and reliability in product assembly and ma- facturing beyond what have been possible. We see assembly and manufacturing becoming more Intelligent with the perception-driven robotic autonomy, more flexible with the human-robot coupled collaborati...
