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Scanning Electron Microscopy and X-Ray Microanalysis
This book has evolved by processes of selection and expansion from its predecessor, Practical Scanning Electron Microscopy (PSEM), published by Plenum Press in 1975. The interaction of the authors with students at the Short Course on Scanning Electron Microscopy and X-Ray Microanalysis held annually at Lehigh University has helped greatly in developing this textbook. The material has been chosen to provide a student with a general introduction to the techniques of scanning electron microscopy and x-ray microanalysis suitable for application in such fields as biology, geology, solid state physics, and materials science. Following the format of PSEM, this book gives the student a basic knowled...
Advanced Scanning Electron Microscopy and X-Ray Microanalysis
This book has its origins in the intensive short courses on scanning elec tron microscopy and x-ray microanalysis which have been taught annually at Lehigh University since 1972. In order to provide a textbook containing the materials presented in the original course, the lecturers collaborated to write the book Practical Scanning Electron Microscopy (PSEM), which was published by Plenum Press in 1975. The course con tinued to evolve and expand in the ensuing years, until the volume of material to be covered necessitated the development of separate intro ductory and advanced courses. In 1981 the lecturers undertook the project of rewriting the original textbook, producing the volume Scan nin...
Electron Probe Quantitation
In 1968, the National Bureau of Standards (NBS) published Special Publication 298 "Quantitative Electron Probe Microanalysis," which contained proceedings of a seminar held on the subject at NBS in the summer of 1967. This publication received wide interest that continued through the years far beyond expectations. The present volume, also the result of a gathering of international experts, in 1988, at NBS (now the National Institute of Standards and Technology, NIST), is intended to fulfill the same purpose. After years of substantial agreement on the procedures of analysis and data evaluation, several sharply differentiated approaches have developed. These are described in this publi cation with all the details required for practical application. Neither the editors nor NIST wish to endorse any single approach. Rather, we hope that their exposition will stimulate the dialogue which is a prerequisite for technical progress. Additionally, it is expected that those active in research in electron probe microanalysis will appreciate more clearly the areas in which further investigations are warranted.
Scanning Electron Microscopy and X-Ray Microanalysis
This thoroughly revised and updated Fourth Edition of a time-honored text provides the reader with a comprehensive introduction to the field of scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS) for elemental microanalysis, electron backscatter diffraction analysis (EBSD) for micro-crystallography, and focused ion beams. Students and academic researchers will find the text to be an authoritative and scholarly resource, while SEM operators and a diversity of practitioners — engineers, technicians, physical and biological scientists, clinicians, and technical managers — will find that every chapter has been overhauled to meet the more practical needs of the tech...
Practical Scanning Electron Microscopy
In the spring of 1963, a well-known research institute made a market survey to assess how many scanning electron microscopes might be sold in the United States. They predicted that three to five might be sold in the first year a commercial SEM was available, and that ten instruments would saturate the marketplace. In 1964, the Cambridge Instruments Stereoscan was introduced into the United States and, in the following decade, over 1200 scanning electron microscopes were sold in the U. S. alone, representing an investment conservatively estimated at $50,000- $100,000 each. Why were the market surveyers wrongil Perhaps because they asked the wrong persons, such as electron microscopists who we...
SEM Microcharacterization of Semiconductors
Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.
Electron Microprobe Analysis and Scanning Electron Microscopy in Geology
Originally published in 2005, this book covers the closely related techniques of electron microprobe analysis (EMPA) and scanning electron microscopy (SEM) specifically from a geological viewpoint. Topics discussed include: principles of electron-target interactions, electron beam instrumentation, X-ray spectrometry, general principles of SEM image formation, production of X-ray 'maps' showing elemental distributions, procedures for qualitative and quantitative X-ray analysis (both energy-dispersive and wavelength-dispersive), the use of both 'true' electron microprobes and SEMs fitted with X-ray spectrometers, and practical matters such as sample preparation and treatment of results. Throughout, there is an emphasis on geological aspects not mentioned in similar books aimed at a more general readership. The book avoids unnecessary technical detail in order to be easily accessible, and forms a comprehensive text on EMPA and SEM for geological postgraduate and postdoctoral researchers, as well as those working in industrial laboratories.
X-Ray Spectrometry in Electron Beam Instruments
From its early days in the 1950s, the electron microanalyzer has offered two principal ways of obtaining x-ray spectra: wavelength dispersive spectrometry (WDS), which utilizes crystal diffraction, and energy dispersive spectrometry (EDS), in which the x-ray quantum energy is measured directly. In general, WDS offers much better peak separation for complex line spectra, whereas EDS gives a higher collection efficiency and is easier and cheaper to use. Both techniques have undergone major transformations since those early days, from the simple focusing spectrometerand gas proportional counter of the 1950s to the advanced semiconductor detectors and programmable spectrometersoftoday. Becauseof...
