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This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films.
The Electrocaloric Effect: Materials and Applications reviews the fundamentals of the electrocaloric effect, the most relevant electrocaloric materials, and electrocaloric measurements and device applications. The book introduces the electrocaloric effect, along with modeling and simulations of this effect. Then, it addresses the latest advances in synthesis, characterization and optimization of the most relevant electrocaloric materials, including ferroelectric materials, liquid materials, lead-free materials, polymers and composites. Finally, there is a review of the latest techniques in measurement and applications in refrigeration and cooling and a discussion of the advantages, challenges and perspectives of the future of electrocaloric refrigeration. - Provides a comprehensive introduction to the electrocaloric effect including experimental techniques to measure, model, and simulate the effect - Reviews the most relevant electrocaloric materials such as composites, polymers, metal oxides, ferroelectric materials, and more - Touches on the design and application of electrocaloric materials for devices with potential cooling and refrigeration applications
This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
Abstracts for presentations at the CMOSETR 2015 conference, May 20-22, 2015.
Final program from the CMOSETR 2015 conference held in Vancouver, Canada, May 20-22, 2015.
With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
The improvement of energy efficiency in electronics and computing systems is currently central to information and communication technology design; low-cost cooling, autonomous portable systems and functioning on recovered energy all need to be continuously improved to allow modern technology to compute more while consuming less. This book presents the basic principles of the origins and limits of heat dissipation in electronic systems. Mechanisms of energy dissipation, the physical foundations for understanding CMOS components and sophisticated optimization techniques are explored in the first half of the book, before an introduction to reversible and quantum computing. Adiabatic computing and nano-relay technology are then explored as new solutions to achieving improvements in heat creation and energy consumption, particularly in renewed consideration of circuit architecture and component technology. Concepts inspired by recent research into energy efficiency are brought together in this book, providing an introduction to new approaches and technologies which are required to keep pace with the rapid evolution of electronics.
With the end of Moore's law and the emergence of new application needs such as those of the Internet of Things (IoT) or artificial intelligence (AI), neuro-inspired, or neuromorphic, information processing is attracting more and more attention from the scientific community. Its principle is to emulate in a simplified way the formidable machine to process information which is the brain, with neurons and artificial synapses organized in network. These networks can be software and therefore implemented in the form of a computer program but also hardware and produced by nanoelectronic circuits. The material path allows very low energy consumption, and the possibility of faithfully reproducing the shape and dynamics of the action potentials of living neurons (biomimetic approach) or even being up to a thousand times faster (high frequency approach). This path is promising and welcomed by the major manufacturers of nanoelectronics, as circuits can now today integrate several million neurons and artificial synapses.