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Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Over the years, many successful attempts have been chapters in this part describe the well-known processes made to describe the art and science of crystal growth, such as Czochralski, Kyropoulos, Bridgman, and o- and many review articles, monographs, symposium v- ing zone, and focus speci cally on recent advances in umes, and handbooks have been published to present improving these methodologies such as application of comprehensive reviews of the advances made in this magnetic elds, orientation of the growth axis, intro- eld. These publications are testament to the grow- duction of a pedestal, and shaped growth. They also ing interest in both bulk and thin- lm crystals because cover a wide r...
The second edition of this handbook provides a state-of-the-art overview on the various aspects in the rapidly developing field of robotics. Reaching for the human frontier, robotics is vigorously engaged in the growing challenges of new emerging domains. Interacting, exploring, and working with humans, the new generation of robots will increasingly touch people and their lives. The credible prospect of practical robots among humans is the result of the scientific endeavour of a half a century of robotic developments that established robotics as a modern scientific discipline. The ongoing vibrant expansion and strong growth of the field during the last decade has fueled this second edition o...
At the dawn of the new millennium, robotics is undergoing a major transfor- tion in scope and dimension. From a largely dominant industrial focus, robotics is rapidly expanding into the challenges of unstructured environments. Inter- ting with, assisting, serving, and exploring with humans, the emerging robots will increasingly touch people and their lives. The goal of this new series of Springer Tracts in Advanced Robotics is to bring,inatimelyfashion,thelatestadvancesanddevelopmentsinroboticsonthe basisoftheirsigni?canceandquality.Itisourhopethatthegreaterdissemination of research developments will stimulate more exchanges and collaborations among the research community and contribute to f...
This book contains the papers that were presented at the 17th International Symposium of Robotics Research (ISRR). The ISRR promotes the development and dissemination of groundbreaking research and technological innovation in robotics useful to society by providing a lively, intimate, forward-looking forum for discussion and debate about the current status and future trends of robotics with great emphasis on its potential role to benefit humankind. The symposium contributions contained in this book report on a variety of new robotics research results covering a broad spectrum organized into the categories: design, control; grasping and manipulation, planning, robot vision, and robot learning.
Ubiquitous Learning: Strategies for Pedagogy, Course Design, and Technology bridges the gap between digital media and education, by presenting an intriguing look on the future of education. By combining theory, research, and practice, this book paints a broad picture of the field of ubiquitous learning by focuses on how to use theory and research to enhance technology integration to support teaching and learning through instructional design strategies for instruction, models and frameworks for course design, and applications of mobile and social media tools to create, implement, and deliver a ubiquitous learning environment. This book is of interest to researchers and graduate students in educational technology, information sciences, adult learning and other learning and performance fields, as well as university faculty, teachers, administrators, policymakers, and industry leaders, who can use this text to make essential decisions related to their respective roles in education. Ubiquitous Learning: Strategies for Pedagogy, Course Design, and Technology is a great reference for those who wish to enhance their levels of teaching and student engagement though the use of technology.
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Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale e...