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Vacuum Electron and Ion Technologies
Vacuum Electron & Ion Technologies
Physics Briefs
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Lithography
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book.
VINČA ANNUAL REPORT 2003
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Polymer Thin Films
This book provides a timely overview of a current state of knowledge of the use of polymer thin film for important technological applications. Polymer thin film book covers the scientific principles and technologies that are necessary to implement the use of polymer electronic device. A wide-ranging and definitive coverage of this emerging field is provided for both academic and practicing scientists. The book is intended to enable readers with a specific background, e.g. polymer nanotechnology, to become acquainted with other specialist aspects of this multidisciplinary field. Part A of the book covers the fundamental of the key aspect related to the development and improvement of polymer thin film technology and part B covers more advanced aspects of the technology are dealt with nano-polymer layer which provide an up-to-date survey of current research directions in the area of polymer thin film and its application skills.
Metals Abstracts
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