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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Nanoscale and nanostructured materials have exhibited different physical properties from the corresponding macroscopic coarse-grained materials due to the size confinement. As a result, there is a need for new techniques to probe the mechanical behavior of advanced materials on the small scales. Micro and Nano Mechanical Testing of Materials and Devices presents the latest advances in the techniques of mechanical testing on the micro- and nanoscales, which are necessary for characterizing the mechanical properties of low-dimensional materials and structures. Written by a group of internationally recognized authors, this book covers topics such as: Techniques for micro- and nano- mechanical characterization; Size effects in the indentation plasticity; Characterization of low-dimensional structure including nanobelts and nanotubes; Characterization of smart materials, including piezoelectric materials and shape memory alloys; Analysis and modeling of the deformation of carbon-nanotubes. Micro and Nano Mechanical Testing of Materials and Devices is a valuable resource for engineers and researchers working in the area of mechanical characterization of advanced materials.
In recent years the Japanese have funded a comprehensive study of carbon materials which incorporate other elements including boron, nitrogen and fluorine, hence the title of the project "Carbon Alloys".Coined in 1992, the phrase "Carbon Alloys" can be applied to those materials mainly composed of carbon materials in multi-component systems. The carbon atoms of each component have a physical and/or chemical interactive relationship with other atoms or compounds. The carbon atoms of the components may have different hybrid bonding orbitals to create quite different carbon components.Eiichi Yasuda and his team consider the definition of Carbon Alloys, present the results of the Carbon Alloys projects, describe typical Carbon Alloys and their uses, discuss recent techniques for their characterization, and finally, illustrate potential applications and future developments for Carbon Alloy science. The book contains over thirty chapters on these studies from as many researchers.The most modern of techniques, particularly in the area of spectroscopy, were used as diagnostic tools, and many of these are applicable to pure carbons also. Porosity in carbons received considerable attention.
Recent developments in advanced ceramics are critically evaluated in respect to their thermal shock and thermal fatigue behavior from an interdisciplinary viewpoint by leading experts. The book covers the aspects of material development, mechanical and fracture mechanical models and experimental testing methods. Special emphasis is given to the influence of a rising crack resistance on the thermal shock behavior, novel irradiation testing methods for a quantitative characterization of the thermal shock and fatigue loading as well as detailed fracture mechanical models for single and multiple crack propagation. This book summarizes developments of the last decade concerning the thermal shock ...
From a November 2000 symposium in Orlando, Florida, 14 papers review the new standards promulgated by American, European, and Japanese professional associations for testing fracture toughness, slow crack growth, and biaxial strength in brittle ceramics. They address a variety of topics regarding imp
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.