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This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
As users, we require more and more reliable and longer operation of electronic devices. Most often, the efforts of scientists and engineers related to energy management, energy conversion, and energy storage are overlooked. The PowerMEMS slogan in its meaning hides the science of materials enabling the construction of modern accumulators and batteries, so important for the developing consumer electronics and electromobility; energy harvesters used wherever conventional power sources cannot be used; and finally the methods and algorithms of energy processing and management that increase the efficiency of the devices they operate. This Special Issue contains six research papers selected from those presented at the 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2019), as and representative of all papers presented during the Conference.
This book is planned to publish with an objective to provide a state-of-art reference book in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors. This reference book is a collection of 13 chapters characterized in 4 parts: magnetic sensors, chemical, optical microsensors and applications. This book provides an overview of resonant magnetic field microsensors based on MEMS, optical microsensors, the main design and fabrication problems of miniature sensors of physical, chemical and biochemical microsensors, chemical microsensors with ordered nanostructures, surface-enhanced Raman scattering microsensors based on hybrid nanoparticles, etc. Several interesting applications area are also discusses in the book like MEMS gyroscopes for consumer and industrial applications, microsensors for non invasive imaging in experimental biology, a heat flux microsensor for direct measurements in plasma surface interactions and so on.
Microtechnology has changed our world since the last century, when silicon microelectronics revolutionized sensor, control and communication areas, with applications extending from domotics to automotive, and from security to biomedicine. The present century, however, is also seeing an accelerating pace of innovation in glassy materials; as an example, glass-ceramics, which successfully combine the properties of an amorphous matrix with those of micro- or nano-crystals, offer a very high flexibility of design to chemists, physicists and engineers, who can conceive and implement advanced microdevices. In a very similar way, the synthesis of glassy polymers in a very wide range of chemical str...
Microchemical Engineering in Practice provides the information chemists and engineers need to evaluate the use of microreactors, covering the technical, operational, and economic considerations for various applications. It explains the systems needed to use microreactors in production and presents examples of microreactor use in different chemistries, including larger scale production processes. There are guidelines on calculating the costs and the risks of production using continuous flow microreactors. Complete with case studies, this is an essential guide for chemists and engineers interested in investigating the advantages of chemical microreactors.
Provides the possibility of reviewing and updating some features of nanostructures for understanding their scientific foundations in order to put a firm basis for future developments. This book provides an effective approach as they require a strict interaction between Science and Technology leading to a high degree of cross fertilization."
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This volume gathers the latest advances, innovations, and applications in the field of structural health monitoring (SHM) and more broadly in the fields of smart materials and intelligent systems. The volume covers highly diverse topics, including signal processing, smart sensors, autonomous systems, remote sensing and support, UAV platforms for SHM, Internet of Things, Industry 4.0, and SHM for civil structures and infrastructures. The contributions, which are published after a rigorous international peer-review process, highlight numerous exciting ideas that will spur novel research directions and foster multidisciplinary collaboration among different specialists. The contents of this volume reflect the outcomes of the activities of EWSHM (European Workshop on Structural Health Monitoring) in 2020.