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Smart Sensor Systems
With contributions from an internationally-renowned group of experts, this book uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, providing complete coverage of all important system and design aspects, their building blocks and methods of signal processing. It examines topics over the whole range of sensor technology from the theory and constraints of basic elements, the applied techniques and electronic, up to the level of application-orientated issues. Developed as a complementary volume to ‘Smart Sensor Systems’ (Wiley 2008), which introduces the theoretical foundations, this volume focuses on practical applications, including: State...
Integrated Smart Sensors
1 1. 1 Introduction The (signal processing and storage) capacity ofthe human brain enables us to become powerful autonomous beings, but only if our brains operate in conjunction with (at least some of) our senses and muscles. Using these organs, we can interact with our environment, learn to adapt, and improve important aspects of our life. Similarly, the signal processing capabilities of modern electronics (computers) could be combined with electronic sensors and actuators to enable interaction with, and adaptation to, the (non-electrical) environment. This willlead to smarter and more powerful automated tools and machines. To facilitate and stimulate such a development, easy-to-use low-cos...
CMOS - MEMS
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Sensors for Mechatronics
This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.
Optical Nano and Micro Actuator Technology
In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many ap...
Autonomous and Intelligent Systems
This book constitutes the refereed proceedings of the Third International Conference on Autonomous and Intelligent Systems, AIS 2012, held in Aveiro, Portugal, in June 2012, collocated with the International Conference on Image Analysis and Recognition, IACIAR 2012. The 31 revised full papers were carefully reviewed and selected from 48 submissions. The papers are organized in topical sections on autonomous sensors and sensor systems, autonomous systems and intelligent control with applications, intelligent fuzzy systems, intelligent robotics, intelligent knowledge management, swarm and evolutionary methods, and applications
Micro Mechanical Systems
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
