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The book presents an in-depth review and analysis of Silicon Carbide device processing. The main topics are: (1) Silicon Carbide Discovery, Properties and Technology, (2) Processing and Application of Dielectrics in Silicon Carbide Devices, (3) Doping by Ion Implantation, (4) Plasma Etching and (5) Fabrication of Silicon Carbide Nanostructures and Related Devices. The book is also suited as supplementary textbook for graduate courses. Keywords: Silicon Carbide, SiC, Technology, Processing, Semiconductor Devices, Material Properties, Polytypism, Thermal Oxidation, Post Oxidation Annealing, Surface Passivation, Dielectric Deposition, Field Effect Mobility, Ion Implantation, Post Implantation Annealing, Channeling, Surface Roughness, Dry Etching, Plasma Etching, Ion Etching, Sputtering, Chemical Etching, Plasma Chemistry, Micromasking, Microtrenching, Nanocrystal, Nanowire, Nanotube, Nanopillar, Nanoelectromechanical Systems (NEMS).
A collection of 25 papers presented at the 11th International Symposium on Ceramic Materials and Components for Energy and Environmental Applications (CMCEE-11), June 14-19, 2015 in Vancouver, BC, Canada. Paper in this volume were presented in the below six symposia from Track 1 on the topic of Ceramics for Energy Conversion, Storage, and Distribution Systems: High-Temperature Fuel Cells and Electrolysis Ceramic-Related Materials, Devices, and Processing for Heat-to-Electricity Direct Conversion Material Science and Technologies for Advanced Nuclear Fission and Fusion Energy Advanced Batteries and Supercapacitors for Energy Storage Applications Materials for Solar Thermal Energy Conversion and Storage High Temperature Superconductors: Materials, Technologies, and Systems
USA companies working in this area include Westinghouse. This material is being investigated primarily in the USA, Japan and Russia alongside that into wide-gap compounds which feature similar characteristics. Applications include high temperature ultra-violet lasers, photodiodes, photodetectors, blue LEDs, high power microwave applications in radar and transmitter devices Special sale to delegates 200 @ 35 Previous volumes in series published by Springer Leading workers in field include Pavlidis (MIT) and Choyke (Pittsburgh, Dept Phys) Feng author is also presenting paper Research in this area is expanding
ICSCRM 2015 Selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy