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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
IIZUKA '96, the 4th International Conference on Soft Computing, emphasized the integration of the components of soft computing to promote the research work on post-digital computers and to realize the intelligent systems. At the conference, new developments and results in soft computing were introduced and discussed by researchers from academic, governmental, and industrial institutions.This volume presents the opening lectures by Prof. Lotfi A. Zadeh and Prof. Walter J. Freeman, the plenary lectures by seven eminent researchers, and about 200 carefully selected papers drawn from more than 20 countries. It documents current research and in-depth studies on the conception, design, and application of intelligent systems.
This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
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