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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
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The papers included in this proceedings volume describe the material requirements for a variety of industrial applications, such as materials processing, manufacturing, energy production, and pollution control. In addition, this book discusses how powder metallurgy materials can meet the performance needs of these applications.