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Written by an outstanding group of applied theoreticians with comprehensive expertise and a wide spectrum of international contacts headed by Prof. A. M. Gusak, this monograph coherently presents the approaches and results hitherto only available in various journal papers. A must-have for all those involved with the public or corporate science of nano systems, thin films and electrical engineering.
This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods. Suitable for engineers and students in microelectronics.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.