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Rapid Thermal Processing for Future Semiconductor Devices
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
The Merkel Cell
Since their first description in 1875, Merkel cells have remained an elusive cell type. Their origin as well as their classification as mechanoreceptors have been a matter of controversy and intense discussion. The peptidergic granules in these cells are suggestive of neuroendocrine functions, but their discovery has raised additional questions regarding Merkel cell function. Essential aspects of structure, development and function of normal Merkel cells and Merkel cell carcinoma are presented in short chapters, providing concise and up-to date information on this fascinating cell type.
Enamel
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Simulation of Semiconductor Processes and Devices 1998
This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)
JJAP
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