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Lecture Notes on Principles of Plasma Processing
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature ...
Plasma Processing of Nanomaterials
We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress. Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and indus...
Handbook Of Solid State Batteries (Second Edition)
Solid-state batteries hold the promise of providing energy storage with high volumetric and gravimetric energy densities at high power densities, yet with far less safety issues relative to those associated with conventional liquid or gel-based lithium-ion batteries. Solid-state batteries are envisioned to be useful for a broad spectrum of energy storage applications, including powering automobiles and portable electronic devices, as well as stationary storage and load-leveling of renewably generated energy. This comprehensive handbook covers a wide range of topics related to solid-state batteries, including advanced enabling characterization techniques, fundamentals of solid-state systems, ...
Dielectrics in Emerging Technologies
"Papers presented at the First International Symposium on Science and Technology of Dielectrics in Emerging Fields, held from 27th April to 2nd May, 2003 in Paris, France"--Pref.
Physics and Technology of High-k Gate Dielectrics II
"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.
