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Lecture Notes on Principles of Plasma Processing
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature ...
Plasma Processing of Nanomaterials
We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress. Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and indus...
Frontiers of Engineering
This volume includes 15 papers from the National Academy of Engineering's 2006 U.S. Frontiers of Engineering (USFOE) Symposium held in September 2006. USFOE meetings bring together 100 outstanding engineers (ages 30 to 45) to exchange information about leading-edge technologies in a range of engineering fields. The 2006 symposium covered four topic areas: intelligent software systems and machines, the nano/bio interface, engineering personal mobility for the 21st century, and supply chain management. A paper by dinner speaker Dr. W. Dale Compton, Lillian M. Gilbreth Distinguished Professor of Industrial Engineering, Emeritus, is also included. The papers describe leading-edge research on commercializing auditory neuroscience, future developments in bionanotechnology, sustainable urban transportation, and managing disruptions to supply chains, among other topics. Appendixes include information about contributors, the symposium program, and a list of meeting participants. This is the twelfth volume in the USFOE series.
Electronic Thin-Film Reliability
Thin films are widely used in the electronic device industry. As the trend for miniaturization of electronic devices moves into the nanoscale domain, the reliability of thin films becomes an increasing concern. Building on the author's previous book, Electronic Thin Film Science by Tu, Mayer and Feldman, and based on a graduate course at UCLA given by the author, this new book focuses on reliability science and the processing of thin films. Early chapters address fundamental topics in thin film processes and reliability, including deposition, surface energy and atomic diffusion, before moving onto systematically explain irreversible processes in interconnect and packaging technologies. Describing electromigration, thermomigration and stress migration, with a closing chapter dedicated to failure analysis, the reader will come away with a complete theoretical and practical understanding of electronic thin film reliability. Kept mathematically simple, with real-world examples, this book is ideal for graduate students, researchers and practitioners.
Physics and Technology of High-k Gate Dielectrics II
"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.
Physics
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Dielectrics in Emerging Technologies
"Papers presented at the First International Symposium on Science and Technology of Dielectrics in Emerging Fields, held from 27th April to 2nd May, 2003 in Paris, France"--Pref.
