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The Physics and Technology of Ion Sources
The first edition of this title has become a well-known reference book on ion sources. The field is evolving constantly and rapidly, calling for a new, up-to-date version of the book. In the second edition of this significant title, editor Ian Brown, himself an authority in the field, compiles yet again articles written by renowned experts covering various aspects of ion source physics and technology. The book contains full chapters on the plasma physics of ion sources, ion beam formation, beam transport, computer modeling, and treats many different specific kinds of ion sources in sufficient detail to serve as a valuable reference text.
Handbook of Ion Sources
The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are det...
Ion Implantation Technology - 94
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Japan Weekly Mail
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The Physics of Thin Film Optical Spectra
The present monograph represents itself as a tutorial to the ?eld of optical properties of thin solid ?lms. It is neither a handbook for the thin ?lm prac- tioner,noranintroductiontointerferencecoatingsdesign,norareviewonthe latest developments in the ?eld. Instead, it is a textbook which shall bridge the gap between ground level knowledge on optics, electrodynamics, qu- tummechanics,andsolidstatephysicsononehand,andthemorespecialized level of knowledge presumed in typical thin ?lm optical research papers on the other hand. In writing this preface, I feel it makes sense to comment on three points, which all seem to me equally important. They arise from the following (- tually interconnected)...
