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Microwave Plasma Sources and Methods in Processing Technology
A practical introduction to microwave plasma for processing applications at a variety of pressures In Microwave Plasma Sources and Methods in Processing Technology, the authors deliver a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation. This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of ...
Microwave Excited Plasmas
The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used in metallurgical treatment, and for materials processing in general. They also have the ability to dissociate molecules and excite atoms as required in analytical chemistry where the information on the constituent concentrations is obtained through optical spectroscopy or mass spectrometry. Finally, microwave plasmas can supply the photons for laser and lighting ...
Microwave Discharges
Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
Compact Plasma and Focused Ion Beams
Recent research has brought the application of microwaves from the classical fields of heating, communication, and generation of plasma discharges into the generation of compact plasmas that can be used for applications such as FIB and small plasma thrusters. However, these new applications bring with them a new set of challenges. With coverage ranging from the basics to new and emerging applications, Compact Plasma and Focused Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff dimension can be generated and utilized for providing focused ion beams of various elements. Starting with the fundamentals of the cutoff problem for wav...
Microwave Induced Plasma Analytical Spectrometry
This book is the most comprehensive publication on MWP technology and MWP-OES analytical spectrometry with an emphasis on practical issues.
Plasma Spectroscopy
Plasma Spectroscopy develops the foundation of spectroscopy for plasmas containing quasi-monochromatic electric fields in the microwaves or optical range. This topic is of major importance for plasma spectroscopy and the diagnostic of technological microwave and radiofrequency discharges, plasma lasers of microwave, optical, and x-ray ranges, pulsed discharges employed as advanced radiation sources, magnetic and laser fusion, and ionospheric and astrophysical plasmas. This monograph presents novel nonlinear-optical methods for theoretical analysis of radiation of quantum systems in media, describes principles for measuring the field and plasma parameters, and discusses their practical applications.
Microwave Discharges
Specialists in different areas of microwave plasma physics, technique, and plasma processing cover all problems of theory, experiments, and applications of microwave discharges, and yield the state-of-the-art trends.
