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The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec tron beam can be blanked at high frequencies for time-resolving exper iments and what problems have tobe taken into account when focusing.
This text provides students as well as practitioners with a comprehensive introduction to the field of scanning electron microscopy (SEM) and X-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers and the use of x-rays for qualitative and quantitative analysis. Separate chapters cover SEM sample preparation methods for hard materials, polymers, and biological specimens. In addition techniques for the elimination of charging in non-conducting specimens are detailed.
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The characterization of materials and phenomena has historically been the principal limitation to the development in each area of science. Once what we are observing is well defined, a theoretical analysis rapidly follows. Modern theories of chemical bonding did not evolve until the methods of analytical chemistry had progressed to a point where the bulk stoichiometry of chemical compounds was firmly established. The great progress made during this century in understanding chemistry has followed directly from the development of an analytical chemistry based on the Dalton assumption of multiple proportions. It has only become apparent in recent years that the extension of our understanding of...