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Advances in Chemical Mechanical Planarization (CMP)
Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, inclu...
Applications of Power Electronics
Power electronics technology is still an emerging technology, and it has found its way into many applications, from renewable energy generation (i.e., wind power and solar power) to electrical vehicles (EVs), biomedical devices, and small appliances, such as laptop chargers. In the near future, electrical energy will be provided and handled by power electronics and consumed through power electronics; this not only will intensify the role of power electronics technology in power conversion processes, but also implies that power systems are undergoing a paradigm shift, from centralized distribution to distributed generation. Today, more than 1000 GW of renewable energy generation sources (phot...
Research in Intelligent and Computing in Engineering
This book comprises select peer-reviewed proceedings of the international conference on Research in Intelligent and Computing in Engineering (RICE 2020) held at Thu Dau Mot University, Vietnam. The volume primarily focuses on latest research and advances in various computing models such as centralized, distributed, cluster, grid, and cloud computing. Practical examples and real-life applications of wireless sensor networks, mobile ad hoc networks, and internet of things, data mining and machine learning are also covered in the book. The contents aim to enable researchers and professionals to tackle the rapidly growing needs of network applications and the various complexities associated with them.
Intelligent Systems, Technologies and Applications
This book explores and discusses various aspects of intelligent systems technologies and their applications. It constitutes the thoroughly refereed post-conference proceedings of the 4th International Symposium on Intelligent Systems Technologies and Applications (ISTA’18), September 19-22, 2018, Bangalore, India. All submissions were evaluated on the basis of their significance, novelty, and technical quality. This book contains 20 papers selected for presentation at the Symposium. The book is chiefly intended for, and offers a valuable resource for, researchers and scientists engaged in various fields involving intelligent systems.
