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Micro and Nano Fabrication
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Proceedings of the 8th Pacific Rim International Conference on Advanced Materials and Processing (PRICM-8)
PRICM-8 features the most prominent and largest-scale interactions in advanced materials and processing in the Pacific Rim region. The conference is unique in its intrinsic nature and architecture which crosses many traditional discipline and cultural boundaries. This is a comprehensive collection of papers from the 15 symposia presented at this event.
High Energy and Short Pulse Lasers
This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. ...
Hot Embossing
The second edition of Hot Embossing: Theory of Microreplication will present the current state of the art in microreplication with a focus on hot embossing, nanoimprint, thermoforming, and roll-to-roll replication. Polymer processing, the theory of polymers and the processing of polymers are discussed in detail. Aspects of process simulation and the corresponding material models are also covered. The book contains in-depth analysis of processing processes and replication techniques including mold fabrication. Monitoring, data analysis and reliability of molded parts is also discussed. In the Second Edition new processes are included, including the process of micro- and nanothermoforming to g...
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