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Thin Film Processes
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
Plasma Science and Technology
In a systematic and comprehensive manner, this book describes the science of low-temperature plasma—a new field that is emerging at a fast pace. An expert well known in this field gives a coherent overview of the applications of low-temperature plasmas to chemical reactions, and in greater detail, to polymers formed or treated in plasma. After laying the groundwork with chapters on the nature of plasma and the variety of typical reactions that occur in discharges, the author deals with specific applications in the production of polymers. He then devotes a chapter each to the deposition of films, the nature of polymers produced in plasmas, and the specific properties of polymers, with a con...
Contemporary Topics in Analytical and Clinical Chemistry
1. Surface Characterization of Biological Materials by X-Ray Photoelectron Spectroscopy.- 2. Surface Analysis using Energetic Ions.- 3. A Synergic Approach to Graduate Research in Spectroscopy and Spectrochemical Analysis.- 4. Correlation Methods in Chemical Data Measurement.- 5. Signal-to-Noise Ratios in Mass Spectroscopic Ion-Current-Measurement Systems.- 6. Analytical Techniques for the Study of Biological Membranes.
Chemical Processing with Lasers
Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining...
Polymer Interface and Adhesion
Poly mer Interface and Adhesion provides the critical basis for further advancement in thisfield. Combining the principles of interfacial science, rheology, stress analysis, and fracturemechanics, the book teaches a new approach to the analysis of long standing problemssuch as: how is the interface formed; what are its physical and mechanical properties;and how does the interface modify the stress field and fracture strength of the material.The book offers many outstanding features, including extensive listings of pertinent references,exhaustive tabulations of the interfacial properties of polymers, critical reviews ofthe many conflicting theories, and complete discussions of coupling agents...
Thin Film Processes II
This sequel to an earlier work offers an exposition of important thin film deposition and etching processes. It is intended to be of use to both the beginner in any particular process and to the experienced user wishing a wider perspective. Information is presented in a tutorial format. New topics which have arisen since the first book are included and some topics from the first book are updated. The practical applications of major thin film deposition and etching processes are given special emphasis.
Thin Films From Free Atoms and Particles
Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first an introduction to free atoms and particles, followed by a chapter describing the embryonic growth of films, such as dimers, trimers, and other small telomers formed and detected. The next chapters discuss the understanding of discharge processes for forming free atoms and particles. The remaining chapters deal with the technology, techniques, and materials in thin films. Physicists, engineers, materials scientists, and chemists will find this book of great value.
Thin Films by Chemical Vapour Deposition
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Conte...
