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Nanoelectromechanical Systems
This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.
Development of CMOS-MEMS/NEMS Devices
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
CMOSETR 2015 Vol. 6: Materials Track
Presentation slides for the Materials track at CMOSETR 2015, May 20-22, 2015.
Nanosystèmes électromécaniques
Les propriétés physico-chimiques et électromécaniques des nanosystèmes mécaniques (NEMS) permettent de sonder le monde de la physique moléculaire et supramoléculaire. La réalisation de ces démonstrations scientifiques demande un soin particulier dans le choix de l’instrumentation à utiliser et pour la conception des nano-objets. Cet ouvrage présente les démarches scientifiques ad hocrequises pour optimiser ces conditions de réalisation. Étudiant les nanosystèmes sous l’angle de l’automatique, de l’électronique et de la physique, il traite à la fois leurs aspects théoriques et technologiques. Nanosystèmes électromécaniques expose les principes de base des NEMS et les méthodes de transduction des déplacements nanométriques, et ensuite il décrit les techniques d’interfaçage avec le monde macroscopique basées sur leur co-intégration avec des circuits. Les principaux travaux théoriques et expérimentaux sur les effets d’échelle sont également présentés ainsi que de nouveaux paradigmes d’application des NEMS.
Integration of Nanomechanical Sensors on CMOS by Nanopatterning Methods
This thesis has been a co-direction between Dr. F. Pérez-Murano from CNM-CSIC, Barcelona (Spain) and Pr. G. Brémond from INSA Lyon/INL-CNRS. This work involves two main aspects: one has to see with the modeling, the design and the operation of a nanomechanical device integrated on CMOS, and the other on nanofabrication techniques. A silicon nanomechanical resonator has been modeled and designed, then the advantages and the feasibility of a monolithic integration with CMOS circuitry have been studied. Indeed NEMS/CMOS are very promising systems which combine outstanding sensing attributes, thanks to the mobile mechanical part, with the possibility to electrically detect the output signal in...
Piezoelectric ZnO Nanostructure for Energy Harvesting, Volume 1
Over the past decade, ZnO as an important II-VI semiconductor has attracted much attention within the scientific community over the world owing to its numerous unique and prosperous properties. This material, considered as a “future material”, especially in nanostructural format, has aroused many interesting research works due to its large range of applications in electronics, photonics, acoustics, energy and sensing. The bio-compatibility, piezoelectricity & low cost fabrication make ZnO nanostructure a very promising material for energy harvesting.
Alluvial Fans
Alluvial fans are important sedimentary environments. They trap sediment delivered from mountain source areas, and exert an important control on the delivery of sediment to downstream environments, to axial drainages and to sedimentary basins. They preserve a sensitive record of environmental change within the mountain source areas. Alluvial fan geomorphology and sedimentology reflect not only drainage basin size and geology, but change in response to tectonic, climatic and base-level controls. One of the challenges facing alluvial fan research is to resolve how these gross controls are reflected in alluvial fan dynamics and to apply the results of studies of modern fan processes and Quatern...
International Bibliography of Historical Sciences
Verzeichnis der exzerpierton zeitschriften: 1926, p. [XXXI]-LXVII.
