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Dielectric Films for Advanced Microelectronics
  • Language: en
  • Pages: 508

Dielectric Films for Advanced Microelectronics

The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
  • Language: en
  • Pages: 572

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.

Advanced Semiconductor-on-Insulator Technology and Related Physics 15
  • Language: en
  • Pages: 347

Advanced Semiconductor-on-Insulator Technology and Related Physics 15

This is the continuation of the long running ¿Silicon-on-Insulator Technology and Devices¿ symposium. The issue of ECS Transactions covers recent significant advances in SOI technologies, SOI-based nanoelectronics and innovative applications including scientific interests. It will be of interest to materials and device scientists, as well as to process and applications oriented engineers and scientists.

Physics and Technology of High-k Gate Dielectrics 4
  • Language: en
  • Pages: 565

Physics and Technology of High-k Gate Dielectrics 4

This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10
  • Language: en
  • Pages: 871

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10

The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.

Cleaning Technology in Semiconductor Device Manufacturing ...
  • Language: en
  • Pages: 458

Cleaning Technology in Semiconductor Device Manufacturing ...

  • Type: Book
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  • Published: 2003
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  • Publisher: Unknown

None

Cleaning Technology in Semiconductor Device Manufacturing VIII
  • Language: en
  • Pages: 452
China Semiconductor Technology International Conference 2010 (CSTIC 2010)
  • Language: en
  • Pages: 1203

China Semiconductor Technology International Conference 2010 (CSTIC 2010)

Our mission is to provide a forum for world experts to discuss technologies, address the growing needs associated with silicon technology, and exchange their discoveries and solutions for current issues of high interest. We encourage collaboration, open discussion, and critical reviews at this conference. Furthermore, we hope that this conference will also provide collaborative opportunities for those who are interested in the semiconductor industry in Asia, particularly in China.

Atomic Layer Deposition Applications 4
  • Language: en
  • Pages: 379

Atomic Layer Deposition Applications 4

The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the symposium focus. ALD can enable the precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties. This issue of the ECS Transactions contains peer reviewed papers presented at the symposium. Breadths of ALD Applications are featured: novel nano-composites and nanostructures, dielectrics for state-of-the-art transistors and capacitors, optoelectronics and a variety of other emerging applications.

Bias Temperature Instability for Devices and Circuits
  • Language: en
  • Pages: 810

Bias Temperature Instability for Devices and Circuits

This book provides a single-source reference to one of the more challenging reliability issues plaguing modern semiconductor technologies, negative bias temperature instability. Readers will benefit from state-of-the art coverage of research in topics such as time dependent defect spectroscopy, anomalous defect behavior, stochastic modeling with additional metastable states, multiphonon theory, compact modeling with RC ladders and implications on device reliability and lifetime.