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System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction metho...
Inkjet-based Micromanufacturing Inkjet technology goes way beyond putting ink on paper: it enables simpler, faster and more reliable manufacturing processes in the fields of micro- and nanotechnology. Modern inkjet heads are per se precision instruments that deposit droplets of fluids on a variety of surfaces in programmable, repeating patterns, allowing, after suitable modifications and adaptations, the manufacturing of devices such as thin-film transistors, polymer-based displays and photovoltaic elements. Moreover, inkjet technology facilitates the large-scale production of flexible RFID transponders needed, eg, for automated logistics and miniaturized sensors for applications in health s...
The 2006 conference, "Smart Prosthetics: Exploring Assistive Devices for the Body and Mind," attracted scientists, engineers and medical researchers to participate in a series of task groups to develop research plans to address various challenges within the prosthetics field. Eleven conference task groups gave the participants eight hours to develop new research approaches to various challenges, including: build a smart prosthesis that will grow with a child; develop a smart prosthetic that can learn better and/or faster; refine technologies to create active orthotic devices; and describe a framework for replacing damaged cortical tissue and fostering circuit integration to restore neurologi...
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'. Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products. The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
This must-have book is the first self-contained summary of recent developments in the field of microscale nuclear magnetic resonance hardware, covering the entire technology from miniaturized detectors, the signal processing chain, and detection sequences. Chapters cover the latest advances in interventional NMR and implantable NMR sensors, as well as in using CMOS technology to manufacture miniaturized, highly scalable NMR detectors for NMR microscopy and high-throughput arrays of NMR spectroscopy detectors.
Optical microendoscopy is an emerging modality for imaging in live subjects. Using gradient refractive index (GRIN) microlenses, microendoscopy enables subcellular-resolution imaging in deep tissues that are inaccessible by traditional imaging techniques. We present a platform of methods and technologies that build upon GRIN microendoscopy: 1) miniaturized microscopes for imaging in awake, behaving animals, 2) methods for imaging contractile dynamics in the muscles of animal and human subjects, 3) chronic brain preparations that allow for longitudinal examinations of subcellular neuronal features and disease progression, and 4) novel microendoscope probes whose imaging capabilities approach that of standard water-immersion microscope objectives. When combined with the broad sets of available fluorescent reporters, and minimally invasive surgical preparations, the work described in this dissertation enables sophisticated experimental designs for probing how cellular char- acteristics may underlie or explain behavior, in models of both healthy and diseased states.
Adaptive Optics for Biological Imaging brings together groundbreaking research on the use of adaptive optics for biological imaging. The book builds on prior work in astronomy and vision science. Featuring contributions by leaders in this emerging field, it takes an interdisciplinary approach that makes the subject accessible to nonspecialists who
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
This book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.