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EUV Sources for Lithography
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Seventeenth Symposium on Biotechnology for Fuels and Chemicals
In the Seventeenth Symposium on Biotechnology for Fuels and Chemicals, leading researchers from academia, industry, and government present state-of-the-art papers on how bioengineering can be used to produce fuels and chemicals competitively. This year's program covered topics in thermal, chemical, and biological processing; applied biological processing; bioprocessing research; process economics and commercialization; and environmental biotechnology. The ideas and techniques described will play an important role in developing new biological processes for producing fuels and chemicals on a large scale, and in reducing pollution, waste disposal problems, and the potential for global climate change.
