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Nanoparticle Engineering for Chemical-Mechanical Planarization
In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices. Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each step in the CMP process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation...
Chemical Processing of Ceramics
Many believe that the silicon/information age is heading to the Age of Biology and that the next frontier in ceramics will most likely require molecular level or nanoscale control. What, then, is the role of ceramics in the age of biology? As we change from an energy-rich society to an energy-declining society, how can ceramic materials appease the
Applied Mathematical Models and Experimental Approaches in Chemical Science
This new book focuses on nanomaterial development as well as investigations of combustion and explosion processes. It presents valuable information on the modeling of processes and on quantum chemical calculations and leading-edge research from around the world in this dynamic field, focusing on concepts above formal experimental techniques and theoretical methods of chemical physics for micro- and nanotechnologies. Also presented are non-linear kinetic appearances and their possible applications.
JJAP Letters
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